110m3/H Ultrapure Water Treatment Plant For Silicon Wafer Cleaning With Edi Module
Place of Origin | Guangdong,China |
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Brand Name | HongJie |
Certification | ISO 14001,ISO 9001,CE,EPA |
Model Number | HJ-UPWSe110T |
Minimum Order Quantity | >=1sets |
Price | US$219200~US$224500 |
Packaging Details | export standard wooden case |
Delivery Time | 1-7working days(depand on raw materials stocking) |
Payment Terms | L/C,D/P,T/T,Western Union |
Supply Ability | >300sets/month |

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xWater Quality | Resistivity ≥≥18.18 MΩ·cm @ 25°C | Flow Rate | 110m³/H (Customizable) |
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Core Process | Double-pass Reverse Osmosis + EDI + Polishing Resin | Key Components | RO Membrane Modules, EDI Units |
Electricity Supply | 380V | After-Sales Service | 2-Year Warranty |
Operation Mode | Fully Automatic | TOC | <0.5 Ppb |
Particles | ≤1 Particle/mL(>0.05 μm) | Dissolved Oxygen | ≤2 Ppb |
Highlight | 110m3/H Ultrapure Water Treatment,Edi Module Ultrapure Water Treatment,110m3/H Water Treatment Plant |
Enhance Filtration Efficiency 110m³/h ultrapure Water treatment plant for Silicon Wafer Cleaning with edi module
I. Overview
Ultra-pure water is a core component in silicon wafer cleaning for achieving efficient, low-defect photovoltaic cell production. Its application directly determines the cleanliness of the silicon wafer surface, minority carrier lifetime, and ultimately, cell efficiency.
Industry rule of thumb: For every 10-fold increase in the purity of ultra-pure water used in silicon wafer cleaning, cell efficiency gains of up to 0.15% can be achieved—“Photovoltaic competitiveness begins with the first drop of ultra-pure water.”
II. Process
Wafer Loading → SC1 Cleaning → Ultrapure Water Rinsing → HF Acid Cleaning → Ultrapure Water Rinsing → SC2 Cleaning → Ultrapure Water Final Rinsing → Drying
III. Parameters
Parameter | Standard Value | ||
Resistivity | ≥18.18 MΩ·cm @ 25°C | ||
TOC | <0.5 ppb | ||
Na⁺/K⁺ | <0.1 ppt | ||
Fe³⁺/Al³⁺ | <0.05 ppt | ||
Cl⁻ | <0.1 ppb | ||
Particles >0.05 μm | ≤1 particle/mL | ||
Dissolved Oxygen | ≤2 ppb |
IV. Here is a guideline for you to get a proper quotation
Tell us the raw water/source of water(tap water, well water, or sea water, etc)
Provide water analysis report(TDS , conductivity, or resistivity, etc)
Required production capacity( 5m³/H, 50m³/H,or 500m³/H, etc)
What's the pure water used for( industrial,Food and Beverage,or agriculture, etc )