Energy Efficient 7tons/H Ultrapure Water Treantment Plant For Wafer Manufacturing

I.Overview
Ultra-pure water (UPW) is a key medium for maintaining process purity in wafer manufacturing. Its quality directly affects chip yield and performance, making it the “invisible lifeline” of wafer manufacturing.

II.Process
Raw Water → Raw Water Pressure Pump → Multimedia Filter → Activated Carbon Filter → Water Softener → Precision Filter → Primary RO → pH Adjustment → Intermediate Water Tank → Secondary RO → Intermediate Water Tank → Intermediate Water Pump → EDI System → Purified Water Tank → Pure Water Pump → UV Sterilizer → Microporous Filter →Pasteurization → Water Point

III.Process Features
Zero chemical pollution throughout the entire process (EDI replaces acid-base regeneration)
Concentrated water recycling, water savings > 30%
Dual UV synergistic control of TOC/microbes
Temperature split to suit different process requirements

IV.Parameters

V.Main Applications
Wafer Cleaning
Chemical Mechanical Polishing (CMP)
Etching and Film Deposition
Cooling and Functional Water

VI.Here is a guideline for you to get a proper quotation
Tell us the raw water/source of water(tap water, well water, or sea water, etc)
Provide water analysis report(TDS , conductivity, or resistivity, etc)
Required production capacity( 5m³/H, 50m³/H,or 500m³/H, etc)
What's the pure water used for( industrial,Food and Beverage,or agriculture, etc )